Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863735 | Epitaxial growth furnace | Shinji Nakahara, Masato Imai, Kazutoshi Inoue, Shintoshi Gima | 2005-03-08 |
| 6578589 | Apparatus for manufacturing semiconductor wafer | Masato Imai, Kazutoshi Inoue, Shinji Nakahara, Shintoshi Gima | 2003-06-17 |
| 6323140 | Method of manufacturing semiconductor wafer | Masato Imai, Kazutoshi Inoue, Shinji Nakahara | 2001-11-27 |
| 6262393 | Epitaxial growth furnace | Masato Imai, Shinji Nakahara, Kazutoshi Inoue | 2001-07-17 |
| 6245152 | Method and apparatus for producing epitaxial wafer | Masato Imai, Shinji Nakahara, Kazutoshi Inoue | 2001-06-12 |
| 5846321 | Method of producing single crystal thin film | Hitoshi Habuka | 1998-12-08 |