Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863735 | Epitaxial growth furnace | Shinji Nakahara, Masato Imai, Masanori Mayusumi, Kazutoshi Inoue | 2005-03-08 |
| 6578589 | Apparatus for manufacturing semiconductor wafer | Masanori Mayusumi, Masato Imai, Kazutoshi Inoue, Shinji Nakahara | 2003-06-17 |