Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7288418 | Process for treating substrates for the microelectronics industry, and substrates obtained by this process | Thierry Barge, André Auberton-Herve, Hiroji Aga | 2007-10-30 |
| 7029993 | Method for treating substrates for microelectronics and substrates obtained according to said method | Thierry Barge, André Auberton-Herve, Hiroji Aga | 2006-04-18 |
| 6897124 | Method of manufacturing a bonded wafers using a Bernoulli chuck | Hiroji Aga | 2005-05-24 |
| 6846718 | Method for producing SOI wafer and SOI wafer | Hiroji Aga, Susumu Kuwabara, Kiyoshi Mitani | 2005-01-25 |
| 6720640 | Method for reclaiming delaminated wafer and reclaimed delaminated wafer | Susumu Kuwabara, Kiyoshi Mitani, Masatake Nakano, Thierry Barge, Christophe Maleville | 2004-04-13 |
| 6596610 | Method for reclaiming delaminated wafer and reclaimed delaminated wafer | Susumu Kuwabara, Kiyoshi Mitani, Masatake Nakano, Thierry Barge, Christophe Maleville | 2003-07-22 |
| 6569749 | Silicon and oxygen ion co-implanation for metallic gettering in epitaxial wafers | Witawat Wijaranakula, Jallepally Ravi | 2003-05-27 |
| 6372609 | Method of Fabricating SOI wafer by hydrogen ION delamination method and SOI wafer fabricated by the method | Hiroji Aga, Kiyoshi Mitani | 2002-04-16 |
| 6284629 | Method of fabricating an SOI wafer and SOI wafer fabricated by the method | Isao Yokokawa, Kiyoshi Mitani | 2001-09-04 |
| 6254933 | Method of chemical vapor deposition | Hitoshi Habuka, Masanori Mayuzumi, Masatake Katayama | 2001-07-03 |
| 6072164 | Heat-treating method and radiant heating device | Tomoyuki Sakai, Naohisa Toda, Hitoshi Habuka | 2000-06-06 |
| 6048793 | Method and apparatus for thin film growth | Hitoshi Habuka, Masanori Mayuzumi, Masatake Katayama | 2000-04-11 |
| 6022793 | Silicon and oxygen ion co-implantation for metallic gettering in epitaxial wafers | Witawat Wijaranakula, Jallepally Ravi | 2000-02-08 |
| 5938840 | Method for vapor phase growth | Hitoshi Habuka, Masanori Mayuzumi, Masatake Katayama | 1999-08-17 |
| 5764353 | Back side damage monitoring system | Eva Brown, Michito Sato | 1998-06-09 |
| 5755878 | Method for vapor phase growth | Hitoshi Habuka, Masanori Mayuzumi, Masatake Katayama | 1998-05-26 |
| 5749974 | Method of chemical vapor deposition and reactor therefor | Hitoshi Habuka, Masanori Mayuzumi, Masatake Katayama | 1998-05-12 |
| 5718762 | Method for vapor-phase growth | Hitoshi Habuka, Masanori Mayuzumi, Hitoshi Tsunoda, Masatake Katayama | 1998-02-17 |