Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850365 | Polishing apparatus with a waste liquid receiver | Junichi Ueno, Kaoru Ishii, Yosuke KANAI, Yuya Nakanishi | 2020-12-01 |
| 10737365 | Turn table transport carriage | Yosuke KANAI | 2020-08-11 |
| 10661410 | Method for measuring template and method for evaluating same | — | 2020-05-26 |
| 10537972 | Polishing method and polishing apparatus | Junichi Ueno, Kaoru Ishii | 2020-01-21 |
| 10532442 | Polishing apparatus and wafer polishing method | Junichi Ueno, Kaoru Ishii, Hiromi Kishida, Yuya Nakanishi, Ryosuke Yoda +1 more | 2020-01-14 |
| 10464189 | Method for manufacturing polishing head, polishing head, and polishing apparatus | Masaaki OSEKI | 2019-11-05 |
| 10414017 | Polishing apparatus | Junichi Ueno, Kaoru Ishii, Hiromi Kishida, Yosuke KANAI, Yuya Nakanishi | 2019-09-17 |
| 10300576 | Polishing method | Masaaki OSEKI, Kaoru Ishii | 2019-05-28 |
| 10201886 | Polishing pad and method for manufacturing the same | Junichi Ueno, Kaoru Ishii, Yoshihide Kawamura, Hiroshi Yoshida, Masataka Takagi | 2019-02-12 |
| 10043673 | Final polishing method of silicon wafer and silicon wafer | — | 2018-08-07 |
| 9981361 | Apparatus for dressing urethane foam pad for use in polishing | Junichi Ueno, Kaoru Ishii | 2018-05-29 |
| 9076750 | Semiconductor wafer and manufacturing method thereof | — | 2015-07-07 |
| 6503363 | System for reducing wafer contamination using freshly, conditioned alkaline etching solution | Masami Nakano, Brian West | 2003-01-07 |
| 6457929 | Apparatus and method for automatically transferring wafers between wafer holders in a liquid environment | Hiroaki Fukabori, Yukio Mukaino | 2002-10-01 |
| 6354794 | Method for automatically transferring wafers between wafer holders in a liquid environment | Hiroaki Fukabori, Yukio Mukaino | 2002-03-12 |
| 6063205 | Use of H.sub.2 O.sub.2 solution as a method of post lap cleaning | Steven Cooper | 2000-05-16 |
| 5764353 | Back side damage monitoring system | Naoto Tate, Eva Brown | 1998-06-09 |
| 5211794 | Wafer etching apparatus | Tatsuo Enomoto, Shigeyoshi Nezu | 1993-05-18 |
| 4248801 | Process for the production of tertiary amine having long chain alkyl group | Susumu Tomidokoro, Daini Saika | 1981-02-03 |