Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10532442 | Polishing apparatus and wafer polishing method | Michito Sato, Junichi Ueno, Kaoru Ishii, Hiromi Kishida, Yuya Nakanishi +1 more | 2020-01-14 |
| 10286521 | Dressing apparatus and dressing method of polishing pad of double-side polishing apparatus | Mitsuhiro Hara | 2019-05-14 |