| 10850365 |
Polishing apparatus with a waste liquid receiver |
Michito Sato, Kaoru Ishii, Yosuke KANAI, Yuya Nakanishi |
2020-12-01 |
|
| 10537972 |
Polishing method and polishing apparatus |
Michito Sato, Kaoru Ishii |
2020-01-21 |
|
| 10532442 |
Polishing apparatus and wafer polishing method |
Michito Sato, Kaoru Ishii, Hiromi Kishida, Yuya Nakanishi, Ryosuke Yoda +1 more |
2020-01-14 |
|
| 10414017 |
Polishing apparatus |
Michito Sato, Kaoru Ishii, Hiromi Kishida, Yosuke KANAI, Yuya Nakanishi |
2019-09-17 |
|
| 10201886 |
Polishing pad and method for manufacturing the same |
Michito Sato, Kaoru Ishii, Yoshihide Kawamura, Hiroshi Yoshida, Masataka Takagi |
2019-02-12 |
|
| 9981361 |
Apparatus for dressing urethane foam pad for use in polishing |
Michito Sato, Kaoru Ishii |
2018-05-29 |
|
| 9866008 |
Apparatus for controlling power source |
Akihiko Morikawa, Takao Ushiyama, Toshinori Sato |
2018-01-09 |
|
| 9547305 |
Drive control apparatus |
Takao Ushiyama, Akihiko Morikawa, Toshinori Sato |
2017-01-17 |
|
| 9327382 |
Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method |
Kazuya Sato, Syuichi Kobayashi |
2016-05-03 |
|
| 9254543 |
Machine tool |
Yutaka Shibui |
2016-02-09 |
|
| 8969789 |
Rotary encoder and method of detecting abnormality of rotary encoder |
Toshinori Sato, Akihiko Morikawa, Takao Ushiyama |
2015-03-03 |
|
| 8834234 |
Double-side polishing apparatus |
Kazuya Sato, Syuichi Kobayashi |
2014-09-16 |
|
| 8659254 |
Servo system, servo motor driving device, safety unit and method for controlling servo system |
— |
2014-02-25 |
|
| 8545291 |
Polishing pad, manufacturing method thereof and polishing method |
Kohki Itoyama, Daisuke Takahashi, Syuichi Kobayashi |
2013-10-01 |
|
| 8454410 |
Polishing apparatus |
Koji Kitagawa, Syuichi Kobayashi, Hideo Kudo, Tadakazu Miyashita, Atsushi Kajikura +1 more |
2013-06-04 |
|
| 8118646 |
Carrier for double-side polishing apparatus, double-side polishing apparatus using the same, and double-side polishing method |
Kazuya Sato, Syuichi Kobayashi, Hideo Kudo |
2012-02-21 |
|
| 7727053 |
Double-side polishing method for wafer |
Syuichi Kobayashi |
2010-06-01 |
|
| 7119514 |
Inverter |
Hiroshi Shimizu, Kimikazu Kubo, Takashi Asai, Masakazu Komatsu, Yasuyuki Tagano +1 more |
2006-10-10 |
$403,000 |
| 7026784 |
Inverter |
Hiroshi Shimizu, Kimikazu Kubo, Takashi Asai, Masakazu Komatsu, Yasuyuki Tagano +1 more |
2006-04-11 |
|
| 6956288 |
Semiconductor device with folded film substrate and display device using the same |
Michiharu Torii, Takayuki Tanaka |
2005-10-18 |
$544,000 |
| 6729941 |
Process for manufacturing semiconductor wafer and semiconductor wafer |
Hisashi Masumura, Hiromasa Hashimoto |
2004-05-04 |
|
| 4574283 |
Data transmission system for use in an air conditioning control apparatus |
Mutsumi Arakawa, Yozo Kawaguchi, Norio Shimura, Shoichi Matsunaga, Kiyoshi Fukaya |
1986-03-04 |
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