Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850365 | Polishing apparatus with a waste liquid receiver | Michito Sato, Kaoru Ishii, Yosuke KANAI, Yuya Nakanishi | 2020-12-01 |
| 10537972 | Polishing method and polishing apparatus | Michito Sato, Kaoru Ishii | 2020-01-21 |
| 10532442 | Polishing apparatus and wafer polishing method | Michito Sato, Kaoru Ishii, Hiromi Kishida, Yuya Nakanishi, Ryosuke Yoda +1 more | 2020-01-14 |
| 10414017 | Polishing apparatus | Michito Sato, Kaoru Ishii, Hiromi Kishida, Yosuke KANAI, Yuya Nakanishi | 2019-09-17 |
| 10201886 | Polishing pad and method for manufacturing the same | Michito Sato, Kaoru Ishii, Yoshihide Kawamura, Hiroshi Yoshida, Masataka Takagi | 2019-02-12 |
| 9981361 | Apparatus for dressing urethane foam pad for use in polishing | Michito Sato, Kaoru Ishii | 2018-05-29 |
| 9866008 | Apparatus for controlling power source | Akihiko Morikawa, Takao Ushiyama, Toshinori Sato | 2018-01-09 |
| 9547305 | Drive control apparatus | Takao Ushiyama, Akihiko Morikawa, Toshinori Sato | 2017-01-17 |
| 9327382 | Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method | Kazuya Sato, Syuichi Kobayashi | 2016-05-03 |
| 9254543 | Machine tool | Yutaka Shibui | 2016-02-09 |
| 8969789 | Rotary encoder and method of detecting abnormality of rotary encoder | Toshinori Sato, Akihiko Morikawa, Takao Ushiyama | 2015-03-03 |
| 8834234 | Double-side polishing apparatus | Kazuya Sato, Syuichi Kobayashi | 2014-09-16 |
| 8659254 | Servo system, servo motor driving device, safety unit and method for controlling servo system | — | 2014-02-25 |
| 8545291 | Polishing pad, manufacturing method thereof and polishing method | Kohki Itoyama, Daisuke Takahashi, Syuichi Kobayashi | 2013-10-01 |
| 8454410 | Polishing apparatus | Koji Kitagawa, Syuichi Kobayashi, Hideo Kudo, Tadakazu Miyashita, Atsushi Kajikura +1 more | 2013-06-04 |
| 8118646 | Carrier for double-side polishing apparatus, double-side polishing apparatus using the same, and double-side polishing method | Kazuya Sato, Syuichi Kobayashi, Hideo Kudo | 2012-02-21 |
| 7727053 | Double-side polishing method for wafer | Syuichi Kobayashi | 2010-06-01 |
| 7119514 | Inverter | Hiroshi Shimizu, Kimikazu Kubo, Takashi Asai, Masakazu Komatsu, Yasuyuki Tagano +1 more | 2006-10-10 |
| 7026784 | Inverter | Hiroshi Shimizu, Kimikazu Kubo, Takashi Asai, Masakazu Komatsu, Yasuyuki Tagano +1 more | 2006-04-11 |
| 6956288 | Semiconductor device with folded film substrate and display device using the same | Michiharu Torii, Takayuki Tanaka | 2005-10-18 |
| 6729941 | Process for manufacturing semiconductor wafer and semiconductor wafer | Hisashi Masumura, Hiromasa Hashimoto | 2004-05-04 |
| 4574283 | Data transmission system for use in an air conditioning control apparatus | Mutsumi Arakawa, Yozo Kawaguchi, Norio Shimura, Shoichi Matsunaga, Kiyoshi Fukaya | 1986-03-04 |