Issued Patents All Time
Showing 1–25 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9266216 | Polishing head and polishing apparatus | — | 2016-02-23 |
| 8636561 | Polishing head and polishing apparatus | Hiromasa Hashimoto, Kouji Morita, Hiromi Kishida, Satoru Arakawa | 2014-01-28 |
| 8323075 | Polishing head, polishing apparatus and method for demounting workpiece | Koji Kitagawa, Kouji Morita, Hiromi Kishida, Satoru Arakawa | 2012-12-04 |
| 8268114 | Workpiece holder for polishing, workpiece polishing apparatus and polishing method | Fumio Suzuki, Kouji Kitagawa | 2012-09-18 |
| 8092281 | Polishing head and polishing apparatus | Koji Kitagawa, Kouji Morita, Hiromi Kishida, Satoru Arakawa | 2012-01-10 |
| 8021210 | Polishing head and polishing apparatus having the same | Kouji Morita, Hiromasa Hashimoto, Satoru Arakawa, Hiromi Kishida | 2011-09-20 |
| 7740521 | Polishing head, polishing apparatus and polishing method for semiconductor wafer | Hiromasa Hashimoto, Yasuharu Ariga, Kouzi Kitagawa, Toshimasa Kubota, Takahiro Matsuda | 2010-06-22 |
| 7695347 | Method and pad for polishing wafer | Kazuya Tomii, Shigenao Ito, Kenichi Anzai, Kenichi Inoue | 2010-04-13 |
| 7582221 | Wafer manufacturing method, polishing apparatus, and wafer | Shigeyoshi Netsu | 2009-09-01 |
| 6769966 | Workpiece holder for polishing, polishing apparatus and polishing method | Kouichi Okamura, Noboru Tamai, Kouzi Morita | 2004-08-03 |
| 6729941 | Process for manufacturing semiconductor wafer and semiconductor wafer | Junichi Ueno, Hiromasa Hashimoto | 2004-05-04 |
| 6558233 | Wafer polishing method, wafer cleaning method and wafer protective film | Takashi Matsuoka, Naotaka Toyama, Hideki Munakata | 2003-05-06 |
| 6422922 | Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece | Kouichi Okamura, Fumio Suzuki, Kouzi Morita, Naotaka Toyama | 2002-07-23 |
| 6399498 | Method and apparatus for polishing work | Fumio Suzuki, Kouichi Okamura | 2002-06-04 |
| 6386957 | Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus | Kouichi Tanaka, Fumio Suzuki, Kouzi Morita, Kouichi Okamura, Naotaka Toyama | 2002-05-14 |
| 6332830 | Polishing method and polishing device | Kouichi Okamura, Fumio Suzuki | 2001-12-25 |
| 6306021 | Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers | Makoto Kobayashi, Teruaki Fukami, Tsutomu Takaku, Mamoru Okada | 2001-10-23 |
| 6135854 | Automatic workpiece transport apparatus for double-side polishing machine | Kiyoshi Suzuki, Noboru Tamai, Syunichi Ogasawara | 2000-10-24 |
| 6120353 | Polishing method for semiconductor wafer and polishing pad used therein | Kiyoshi Suzuki, Teruaki Fukami | 2000-09-19 |
| 6042688 | Carrier for double-side polishing | Kiyoshi Suzuki | 2000-03-28 |
| 5951374 | Method of polishing semiconductor wafers | Tadahiro Kato, Masami Nakano, Hideo Kudo | 1999-09-14 |
| 5942445 | Method of manufacturing semiconductor wafers | Tadahiro Kato, Sadayuki Okuni, Hideo Kudo | 1999-08-24 |
| 5914053 | Apparatus and method for double-sided polishing semiconductor wafers | Kiyoshi Suzuki, Hideo Kudo | 1999-06-22 |
| 5891353 | Polishing agent used for polishing semiconductor wafers and polishing method using the same | Kiyoshi Suzuki, Hideo Kudo, Teruaki Fukami | 1999-04-06 |
| 5866226 | Polishing agent used for polishing semiconductor wafers and polishing method using the same | Kiyoshi Suzuki, Hideo Kudo, Teruaki Fukami | 1999-02-02 |