Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8287331 | Method for manufacturing polishing pad, and method for polishing wafer | Koichi Kanaya, Masayoshi Sekizawa | 2012-10-16 |
| 6558233 | Wafer polishing method, wafer cleaning method and wafer protective film | Takashi Matsuoka, Hideki Munakata, Hisashi Masumura | 2003-05-06 |
| 6422922 | Workpiece holder for polishing, apparatus for polishing workpiece and method for polishing workpiece | Kouichi Okamura, Fumio Suzuki, Hisashi Masumura, Kouzi Morita | 2002-07-23 |
| 6386957 | Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus | Hisashi Masumura, Kouichi Tanaka, Fumio Suzuki, Kouzi Morita, Kouichi Okamura | 2002-05-14 |