Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905731 | Wafer container and dusting prevention method thereof and method for containing wafer | — | 2005-06-14 |
| 6558233 | Wafer polishing method, wafer cleaning method and wafer protective film | Takashi Matsuoka, Naotaka Toyama, Hisashi Masumura | 2003-05-06 |
| 6125554 | Method and apparatus for drying flat objects | — | 2000-10-03 |
| 5540245 | Processing equipment of single substrate transfer type | Shiomi Hara | 1996-07-30 |