Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7740521 | Polishing head, polishing apparatus and polishing method for semiconductor wafer | Hiromasa Hashimoto, Yasuharu Ariga, Hisashi Masumura, Toshimasa Kubota, Takahiro Matsuda | 2010-06-22 |