Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7659212 | Process control method in spin etching and spin etching apparatus | Masato Tsuchiya | 2010-02-09 |
| 6135854 | Automatic workpiece transport apparatus for double-side polishing machine | Hisashi Masumura, Kiyoshi Suzuki, Noboru Tamai | 2000-10-24 |