TF

Teruaki Fukami

SC Shin-Etsu Handotai Co.: 9 patents #84 of 679Top 15%
Overall (All Time): #585,965 of 4,157,543Top 15%
9
Patents All Time

Issued Patents All Time

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
6884721 Silicon wafer storage water and silicon wafer storage method 2005-04-26
6582280 Sandblasting agent, wafer treated with the same, and method of treatment with the same Toshiaki Otaka 2003-06-24
6306021 Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers Hisashi Masumura, Makoto Kobayashi, Tsutomu Takaku, Mamoru Okada 2001-10-23
6120353 Polishing method for semiconductor wafer and polishing pad used therein Kiyoshi Suzuki, Hisashi Masumura 2000-09-19
6060396 Polishing agent used for polishing semiconductor silicon wafers and polishing method using the same Tsutomu Takaku 2000-05-09
5891353 Polishing agent used for polishing semiconductor wafers and polishing method using the same Hisashi Masumura, Kiyoshi Suzuki, Hideo Kudo 1999-04-06
5866226 Polishing agent used for polishing semiconductor wafers and polishing method using the same Hisashi Masumura, Kiyoshi Suzuki, Hideo Kudo 1999-02-02
5821167 Method of manufacturing semiconductor mirror wafers Hisashi Masumura, Kiyoshi Suzuki, Hideo Kudo 1998-10-13
5792258 High-frequency induction heater and method of producing semiconductor single crystal using the same Masanori Kimura, Ken Yoshizawa, Hirotoshi Yamagishi 1998-08-11