Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6306021 | Polishing pad, polishing method, and polishing machine for mirror-polishing semiconductor wafers | Hisashi Masumura, Makoto Kobayashi, Teruaki Fukami, Mamoru Okada | 2001-10-23 |
| 6190238 | Polishing pad, method and apparatus for treating polishing pad and polishing method | Koichi Tanaka, Koji Morita | 2001-02-20 |
| 6060396 | Polishing agent used for polishing semiconductor silicon wafers and polishing method using the same | Teruaki Fukami | 2000-05-09 |
| 5934981 | Method for polishing thin plate and apparatus for polishing | Koichi Tanaka, Toshihiro Tsuchiya, Koji Morita | 1999-08-10 |
| 5797789 | Polishing system | Koichi Tanaka, Toshihiro Tsuchiya, Koji Morita | 1998-08-25 |
| 5733177 | Process of polishing wafers | Toshihiro Tsuchiya, Kouichi Tanaka, Kiromasa Hashimoto, Kouji Morita | 1998-03-31 |