Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10532442 | Polishing apparatus and wafer polishing method | Michito Sato, Junichi Ueno, Kaoru Ishii, Yuya Nakanishi, Ryosuke Yoda +1 more | 2020-01-14 |
| 10414017 | Polishing apparatus | Junichi Ueno, Michito Sato, Kaoru Ishii, Yosuke KANAI, Yuya Nakanishi | 2019-09-17 |
| 9278425 | Polishing head and polishing apparatus | Hiromasa Hashimoto, Kouji Morita, Takashi Aratani, Satoru Arakawa | 2016-03-08 |
| 8636561 | Polishing head and polishing apparatus | Hisashi Masumura, Hiromasa Hashimoto, Kouji Morita, Satoru Arakawa | 2014-01-28 |
| 8323075 | Polishing head, polishing apparatus and method for demounting workpiece | Hisashi Masumura, Koji Kitagawa, Kouji Morita, Satoru Arakawa | 2012-12-04 |
| 8092281 | Polishing head and polishing apparatus | Hisashi Masumura, Koji Kitagawa, Kouji Morita, Satoru Arakawa | 2012-01-10 |
| 8021210 | Polishing head and polishing apparatus having the same | Hisashi Masumura, Kouji Morita, Hiromasa Hashimoto, Satoru Arakawa | 2011-09-20 |
| 7247083 | Polishing apparatus | Tadakazu Miyashita | 2007-07-24 |
| 6692341 | Abrasive machine | Yoshio Nakamura, Susumu Onishi | 2004-02-17 |