Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9278425 | Polishing head and polishing apparatus | Hiromasa Hashimoto, Kouji Morita, Takashi Aratani, Hiromi Kishida | 2016-03-08 |
| 8886486 | Device and method for testing APD measuring device | Sunao Ronte | 2014-11-11 |
| 8636561 | Polishing head and polishing apparatus | Hisashi Masumura, Hiromasa Hashimoto, Kouji Morita, Hiromi Kishida | 2014-01-28 |
| 8355467 | Amplitude probability distribution measurement apparatus | Sunao Ronte | 2013-01-15 |
| 8323075 | Polishing head, polishing apparatus and method for demounting workpiece | Hisashi Masumura, Koji Kitagawa, Kouji Morita, Hiromi Kishida | 2012-12-04 |
| 8092281 | Polishing head and polishing apparatus | Hisashi Masumura, Koji Kitagawa, Kouji Morita, Hiromi Kishida | 2012-01-10 |
| 8021210 | Polishing head and polishing apparatus having the same | Hisashi Masumura, Kouji Morita, Hiromasa Hashimoto, Hiromi Kishida | 2011-09-20 |
| 5908347 | Polishing system for polishing wafer | Makoto Nakajima, Yoshio Nakamura, Yasuhide Denda, Toshihisa Yanagisawa, Toshiaki Seki +3 more | 1999-06-01 |