Polishing apparatus

Assignee

• Shin-Etsu Handotai Co.
• Fujikoshi Machinery

Inventors

• Koji Kitagawa (26 patents)
• Junichi Ueno (22 patents)
• Syuichi Kobayashi (11 patents)
• Hideo Kudo (47 patents)
• Tadakazu Miyashita (9 patents)
• Atsushi Kajikura (7 patents)
• Yoshinobu Nishimoto (5 patents)

View full patent text on Google Patents →