Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11298796 | Method for double-side polishing wafer | Yuki Tanaka, Daichi KITAZUME | 2022-04-12 |
| 10118272 | Method for evaluating polishing pad and method for polishing wafer | Yuki Tanaka, Kazuya Sato | 2018-11-06 |
| 9764443 | Method of producing carrier for use in double-side polishing apparatus and method of double-side polishing wafers | Kazuya Sato, Yuki Tanaka, Kenji Iha, Toshinari Kinjo | 2017-09-19 |
| 9327382 | Carrier for a double-side polishing apparatus, double-side polishing apparatus using this carrier, and double-side polishing method | Junichi Ueno, Kazuya Sato | 2016-05-03 |
| 9266215 | Method of double-side polishing wafer | Kazuya Sato, Yuki Tanaka | 2016-02-23 |
| 8834234 | Double-side polishing apparatus | Junichi Ueno, Kazuya Sato | 2014-09-16 |
| 8545291 | Polishing pad, manufacturing method thereof and polishing method | Kohki Itoyama, Daisuke Takahashi, Junichi Ueno | 2013-10-01 |
| 8454410 | Polishing apparatus | Koji Kitagawa, Junichi Ueno, Hideo Kudo, Tadakazu Miyashita, Atsushi Kajikura +1 more | 2013-06-04 |
| 8118646 | Carrier for double-side polishing apparatus, double-side polishing apparatus using the same, and double-side polishing method | Kazuya Sato, Junichi Ueno, Hideo Kudo | 2012-02-21 |
| 7727053 | Double-side polishing method for wafer | Junichi Ueno | 2010-06-01 |
| 6975960 | Method for evaluating wafer configuration, wafer, and wafer sorting method | Makoto Kobayashi | 2005-12-13 |