Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11453098 | Carrier for double-side polishing apparatus, double-side polishing apparatus, and double-side polishing method | Yuki Tanaka | 2022-09-27 |
| 11298796 | Method for double-side polishing wafer | Yuki Tanaka, Syuichi Kobayashi | 2022-04-12 |
| 11065735 | Manufacturing method of carrier for double-side polishing apparatus and method of double-side polishing wafer | Yuki Tanaka | 2021-07-20 |