TE

Tatsuo Enomoto

SC Shin-Etsu Handotai Co.: 10 patents #71 of 679Top 15%
Overall (All Time): #494,170 of 4,157,543Top 15%
10
Patents All Time

Issued Patents All Time

Showing 1–10 of 10 patents

Patent #TitleCo-InventorsDate
11584037 Wire saw apparatus and method for manufacturing wafer Kazutoshi Mizushima, Toshiaki Otaka, Yuichi Shimizu 2023-02-21
10730161 Method for conditioning polishing pad and polishing apparatus Taichi Yasuda, Masanao SASAKI, Takuya Sasaki, Kazumasa Asai 2020-08-04
10434621 Workpiece processing apparatus and workpiece processing method Taichi Yasuda 2019-10-08
10236191 Wafer drying apparatus and method for drying a wafer Taichi Yasuda 2019-03-19
10166649 Machining apparatus for workpiece Taichi Yasuda 2019-01-01
9931730 Automatic handling apparatus with positioning pins Taichi Yasuda 2018-04-03
9728442 Workpiece holding apparatus Taichi Yasuda 2017-08-08
9050698 Manufacturing method of carrier for double-side polishing apparatus, carrier for double-side polishing apparatus, and double-side polishing method of wafer Taichi Yasuda 2015-06-09
7902042 Method of manufacturing SOI wafer and thus-manufactured SOI wafer Hiroji Aga, Norihiro Kobayashi, Masayuki Imai, Hiroshi Takeno 2011-03-08
5211794 Wafer etching apparatus Michito Sato, Shigeyoshi Nezu 1993-05-18