Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10730161 | Method for conditioning polishing pad and polishing apparatus | Masanao SASAKI, Tatsuo Enomoto, Takuya Sasaki, Kazumasa Asai | 2020-08-04 |
| 10434621 | Workpiece processing apparatus and workpiece processing method | Tatsuo Enomoto | 2019-10-08 |
| 10335918 | Workpiece processing apparatus | Masanao SASAKI | 2019-07-02 |
| 10236191 | Wafer drying apparatus and method for drying a wafer | Tatsuo Enomoto | 2019-03-19 |
| 10166649 | Machining apparatus for workpiece | Tatsuo Enomoto | 2019-01-01 |
| 9987721 | Double-side polishing method | Masanao SASAKI, Kazuaki Aoki, Taketoshi Sato, Takehiro Yuasa, Kazumasa Asai +1 more | 2018-06-05 |
| 9931730 | Automatic handling apparatus with positioning pins | Tatsuo Enomoto | 2018-04-03 |
| 9728442 | Workpiece holding apparatus | Tatsuo Enomoto | 2017-08-08 |
| 9050698 | Manufacturing method of carrier for double-side polishing apparatus, carrier for double-side polishing apparatus, and double-side polishing method of wafer | Tatsuo Enomoto | 2015-06-09 |