Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686479 | Encapsulated cleanroom system | Hitoshi Maekawa, Sommawan Khumpuang, Takashi Yajima, Yuuki Ishida | 2023-06-27 |
| 11056410 | Method of manufacturing semiconductor package using alignment mark on wafer | Sommawan Khumpuang, Fumito IMURA | 2021-07-06 |
| 11011403 | Transport container automatic clamping mechanism | Hitoshi Maekawa, Hiroyuki Nishihara, Koji Sagisawa | 2021-05-18 |
| 10632590 | Work processing apparatus and liquid chemical bag for the same | Masayuki Tsukada, Kazutaka Shibuya, Takayuki Fuse, Yoshio Nakamura | 2020-04-28 |
| 10478867 | Treatment liquid supply device using syringe, and wet treatment device | Sommawan Khumpuang, Akio Kobayashi, Takeshi Umino, Sonoko Matsuda | 2019-11-19 |
| 10431446 | Wet processing apparatus | Sommawan Khumpuang, Shinichi Ikeda, Akihiro Goto, Hiroshi Amano | 2019-10-01 |
| 10332768 | Compact manufacturing device, and inter-device transport system for production line | Hitoshi Maekawa | 2019-06-25 |
| 10304675 | System for integrating preceding steps and subsequent steps | Michihiro Inoue, Fumito IMURA, Arami Saruwatari, Sommawan Khumpuang | 2019-05-28 |
| 10286426 | Columnar laminar flow generation device and method for generating columnar laminar flows | Shuuji Okuda, Sommawan Khumpuang, Sho Takeuchi, Yoshihisa Sensu, Takahiro Ito | 2019-05-14 |
| 10240350 | Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure | Tadanari Anpo | 2019-03-26 |
| 10186489 | Process substrate with crystal orientation mark, method of detecting crystal orientation, and reading device of crystal orientation mark | Sommawan Khumpuang, Shinichi Ikeda | 2019-01-22 |
| 10163819 | Surface mount package and manufacturing method thereof | Sommawan Khumpuang, Fumito IMURA, Michihiro Inoue, Arami Saruwatari | 2018-12-25 |
| 10163674 | Circular support substrate for semiconductor | Sommawan Khumpuang, Fumito IMURA, Michihiro Inoue, Arami Saruwatari | 2018-12-25 |
| 10137570 | Link-type transfer robot | Kenji Hirota, Shinichi Imai, Hitoshi Maekawa | 2018-11-27 |
| 10115619 | Coupling transfer system | Hitoshi Maekawa | 2018-10-30 |
| 9777375 | Converging mirror furnace | Shinichi Ikeda, Takanori Mikahara, Hitoshi Habuka, Sommawan Khumpuang | 2017-10-03 |
| 9563136 | Yellow room system | — | 2017-02-07 |
| 9524895 | Substrate transfer antechamber mechanism | Hitoshi Maekawa | 2016-12-20 |
| 9513567 | Exposure apparatus and exposure method | Sommawan Khumpuang, Yoshiki Inuzuka, Yasuaki Yokoyama | 2016-12-06 |
| 9478452 | Small production device and production system using the same | Hitoshi Maekawa, Shizuka NAKANO | 2016-10-25 |
| 9281223 | Coupling system | — | 2016-03-08 |
| 9254540 | Mounting structure of movable manufacturing device, fixing structure and movable manufacturing device | Shizuka NAKANO, Hitoshi Maekawa, Shinji FUTAGAWA, Takahiro Fukuda | 2016-02-09 |
| 9209054 | Device manufacturing apparatus | Satoshi Haraichi, Akira Ishibashi | 2015-12-08 |
| 9123795 | Method of manufacturing semiconductor wafers | Yoshio Nakamura, Daizo Ichikawa, Haruo Sumizawa, Sommawan Khumpuang, Shinichi Ikeda | 2015-09-01 |
| 9017146 | Wafer polishing apparatus | Yoshio Nakamura, Yoshio Otsuka, Takashi Okubo, Kazutaka Shibuya, Takayuki Fuse +2 more | 2015-04-28 |