Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10774991 | Gas filling apparatus | Yasuyuki Tsumura, Atsushi Takase, Kiyoshi Kimura | 2020-09-15 |
| 10668593 | Work polishing head | Masayuki Tsukada, Kazutaka Shibuya | 2020-06-02 |
| 10632590 | Work processing apparatus and liquid chemical bag for the same | Masayuki Tsukada, Kazutaka Shibuya, Yoshio Nakamura, Shiro Hara | 2020-04-28 |
| 10396832 | Filling apparatus | Ichi Emori, Hiroshi Okawa | 2019-08-27 |
| 10041628 | Gas filling apparatus | Tsutomu Otaki, Yasuyuki Tsumura, Atsushi Takase, Kiyoshi Kimura, Masahiro Takezawa | 2018-08-07 |
| 9017146 | Wafer polishing apparatus | Yoshio Nakamura, Yoshio Otsuka, Takashi Okubo, Kazutaka Shibuya, Shiro Hara +2 more | 2015-04-28 |