Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6024800 | Plasma processing apparatus | Toshimi Katsura, Hideaki Miyazawa | 2000-02-15 |
| 5759334 | Plasma processing apparatus | Kenichi Kojima, Tokihiro Ayabe, Takehiko Senoo, Kishichi Haga | 1998-06-02 |