Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9194043 | Atomic layer deposition apparatus | Hiroyuki Tachibana, Naomasa Miyatake, Yasunari Mori | 2015-11-24 |
| 9068261 | Atomic layer deposition apparatus and thin film forming method | Yasunari Mori | 2015-06-30 |
| 8440268 | Method and apparatus for growing plasma atomic layer | Keisuki Washio, Naomasa Miyatake, Hiroyuki Tachibana, Nozomu Hattori | 2013-05-14 |
| 8202367 | Atomic layer growing apparatus | Hiroyuki Tachibana, Nozomu Hattori | 2012-06-19 |
| 7544249 | Large-diameter SiC wafer and manufacturing method thereof | Shigehiro Nishino | 2009-06-09 |
| 7022545 | Production method of SiC monitor wafer | Isao Yamada, Jiro Matsuo, Noriaki Toyoda, Naomasa Miyatake | 2006-04-04 |
| 6995036 | Production method of α-SiC wafer | Shigehiro Nishino, Yoshiharu Chinone | 2006-02-07 |