Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8440268 | Method and apparatus for growing plasma atomic layer | Kazutoshi Murata, Naomasa Miyatake, Hiroyuki Tachibana, Nozomu Hattori | 2013-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8440268 | Method and apparatus for growing plasma atomic layer | Kazutoshi Murata, Naomasa Miyatake, Hiroyuki Tachibana, Nozomu Hattori | 2013-05-14 |