Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12344936 | Liquid raw material supplying method and gas supply apparatus | Satoshi MIZUNAGA, Naohide Ito | 2025-07-01 |
| 11621185 | Semiconductor manufacturing apparatus and method for transferring wafer | Rintaro Takao, Naohide Ito, Masayuki Kozawa | 2023-04-04 |
| 9766617 | Substrate processing apparatus | Junichi Ogawa, Youichi Nakayama, Keiji Osada | 2017-09-19 |