Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9766617 | Substrate processing apparatus | Junichi Ogawa, Keiji Osada, Hiroaki Dewa | 2017-09-19 |
| 9070728 | Method of lowering temperature of substrate table, computer-readable storage medium, and substrate processing system | Kenichi Kobayashi, Kozo Kai, Kenji Shirasaka | 2015-06-30 |
| 8612038 | Target object processing system and method of controlling the same | Kenichi Kobayashi, Keiichiro Shiki | 2013-12-17 |
| 7692916 | Capacitive coupling plasma processing apparatus and method | Naoki Matsumoto, Hideaki Tanaka, Hisashi Fujiwara, Chishio Koshimizu, Fumiaki Koiwa +2 more | 2010-04-06 |
| 7266418 | Substrate processing apparatus, history information recording method, history information recording program, and history information recording system | Daisuke Morisawa | 2007-09-04 |