Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7692916 | Capacitive coupling plasma processing apparatus and method | Naoki Matsumoto, Hideaki Tanaka, Hisashi Fujiwara, Chishio Koshimizu, Toshiyuki Kobayashi +2 more | 2010-04-06 |