Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621185 | Semiconductor manufacturing apparatus and method for transferring wafer | Naohide Ito, Hiroaki Dewa, Masayuki Kozawa | 2023-04-04 |
| 11152241 | Substrate processing apparatus and notification method | Hiromichi Fujii, Yoshihide Kagihara | 2021-10-19 |
| 9920424 | Method of cleaning thin film forming apparatus, thin film forming method, thin film forming apparatus and non-transitory recording medium | Ryota GOTO | 2018-03-20 |