Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081377 | Substrate processing system | Kiyoshi Suzuki | 2021-08-03 |
| 9920424 | Method of cleaning thin film forming apparatus, thin film forming method, thin film forming apparatus and non-transitory recording medium | Rintaro Takao | 2018-03-20 |