YK

Yoshihide Kagihara

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #2,756,241 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11152241 Substrate processing apparatus and notification method Rintaro Takao, Hiromichi Fujii 2021-10-19