Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10002417 | Ready for rotation state detection device, method of detecting ready for rotation state and substrate processing apparatus | Kiichi Takahashi, Takeshi Kobayashi, Yuji Takabatake, Naohide Ito | 2018-06-19 |
| 9583318 | Plasma processing apparatus, plasma processing method, and recording medium | Shigehiro Miura, Takeshi Kobayashi, Naohide Ito | 2017-02-28 |