Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385136 | Apparatus for performing film forming process on substrate, and method of exhausting processing gas from apparatus for performing film forming process on substrate | — | 2025-08-12 |
| 12385132 | Substrate processing apparatus and substrate processing method | Ibuki HAYASHI, Yasushi Takeuchi, Junnosuke TAGUCHI | 2025-08-12 |
| 12359302 | Film deposition apparatus and film deposition method | — | 2025-07-15 |
| 12297536 | Substrate processing apparatus and substrate processing method | — | 2025-05-13 |
| 12247287 | Apparatus for performing film forming process on substrate and method of using vacuum chuck mechanism provided in the apparatus | — | 2025-03-11 |
| 12091753 | Substrate processing apparatus | — | 2024-09-17 |
| 11869798 | Deposition apparatus | Yudo SUGAWARA, Noriko Sato | 2024-01-09 |
| 11702747 | Rotation driving mechanism and rotation driving method, and substrate processing apparatus and substrate processing method using same | — | 2023-07-18 |
| 11674225 | Substrate processing apparatus | Hitoshi Kato, Yukio Ohizumi, Takeshi Kobayashi | 2023-06-13 |
| 11492702 | Film-forming apparatus and film-forming method | Yuka NAKASATO | 2022-11-08 |
| 11339472 | Substrate processing apparatus | — | 2022-05-24 |
| 10731255 | Film forming method | Yuka NAKASATO, Kohei Doi | 2020-08-04 |
| 10584416 | Substrate processing apparatus | Hitoshi Kato, Yukio Ohizumi, Takeshi Kobayashi | 2020-03-10 |
| 10221480 | Substrate processing apparatus and substrate processing method | Hitoshi Kato, Yukio Ohizumi | 2019-03-05 |
| 10094022 | Substrate processing apparatus and method of fabricating substrate loading unit | — | 2018-10-09 |
| 9988717 | Substrate processing apparatus | — | 2018-06-05 |
| 9683290 | Substrate processing apparatus having a pillar support structure for preventing transformation of a ceiling portion | — | 2017-06-20 |
| 9598767 | Gas processing apparatus | — | 2017-03-21 |
| 9416448 | Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method | Hitoshi Kato, Kohichi Orito | 2016-08-16 |
| 9297072 | Film deposition apparatus | Hitoshi Kato | 2016-03-29 |
| 9267204 | Film deposition apparatus, substrate processing apparatus, film deposition method, and storage medium | — | 2016-02-23 |
| 9103030 | Film deposition apparatus | Hitoshi Kato | 2015-08-11 |
| 9093490 | Film deposition apparatus | Hitoshi Kato, Hiroyuki Kikuchi | 2015-07-28 |
| 9039837 | Film deposition apparatus and substrate processing apparatus | — | 2015-05-26 |
| 8992685 | Substrate processing apparatus, substrate processing method, and computer-readable storage medium | Hitoshi Kato, Hiroyuki Kikuchi, Yu Wamura, Jun Ogawa | 2015-03-31 |