Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7674336 | Processing apparatus | Yukio Ohizumi, Keisuke Nagatsuka | 2010-03-09 |
| 7432475 | Vertical heat treatment device and method controlling the same | Makoto Nakajima, Takanori Saito, Tsuyoshi Takizawa | 2008-10-07 |
| 6235121 | Vertical thermal treatment apparatus | Tomohisa Shimazu | 2001-05-22 |
| 5981966 | Auto-teaching method in semiconductor processing system | — | 1999-11-09 |
| D404015 | Wafer boat for use in a semiconductor wafer heat processing apparatus | — | 1999-01-12 |