Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8961691 | Film deposition apparatus, film deposition method, computer readable storage medium for storing a program causing the apparatus to perform the method | Hitoshi Kato, Kazuteru Obara | 2015-02-24 |
| 8944077 | Film deposition apparatus, cleaning method for the same, and computer storage medium storing program | Hitoshi Kato | 2015-02-03 |
| 8882915 | Film deposition apparatus, film deposition method, and computer readable storage medium | Hitoshi Kato, Hiroyuki Kikuchi | 2014-11-11 |
| 8854449 | Substrate position detection apparatus, film deposition apparatus equipped with the same, and substrate position detection method | Katsuyoshi Aikawa | 2014-10-07 |
| 8845857 | Substrate processing apparatus | Yukio Ohizumi | 2014-09-30 |
| 8840727 | Film deposition apparatus, substrate processor, film deposition method, and computer-readable storage medium | Hitoshi Kato | 2014-09-23 |
| 8808456 | Film deposition apparatus and substrate process apparatus | Hitoshi Kato | 2014-08-19 |
| 8746170 | Substrate process apparatus, substrate process method, and computer readable storage medium | Kohichi Orito, Tatsuya Tamura | 2014-06-10 |
| 8721790 | Film deposition apparatus | Hitoshi Kato, Kohichi Orito, Yasushi Takeuchi, Hiroyuki Kikuchi | 2014-05-13 |
| 8673079 | Film deposition apparatus and substrate processing apparatus | Hitoshi Kato, Tomoki Haneishi | 2014-03-18 |
| 8673395 | Film deposition apparatus, film deposition method, and storage medium | Hitoshi Kato | 2014-03-18 |
| 8518183 | Film deposition apparatus, substrate process apparatus, film deposition method, and computer readable storage medium | — | 2013-08-27 |
| 8465592 | Film deposition apparatus | Hitoshi Kato, Anthony Dip | 2013-06-18 |
| 8465591 | Film deposition apparatus | Hitoshi Kato, Anthony Dip | 2013-06-18 |
| 8372202 | Film deposition apparatus | Hitoshi Kato | 2013-02-12 |
| D655257 | Top plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-03-06 |
| D655262 | Side wall for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-03-06 |
| D655259 | Top plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-03-06 |
| D655260 | Gas-separating plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-03-06 |
| D655261 | Gas-separating plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-03-06 |
| D655258 | Side wall for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-03-06 |
| D654883 | Top plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-02-28 |
| D654884 | Top plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-02-28 |
| D654882 | Gas-separating plate for reactor for manufacturing semiconductor | Katsuyuki Hishiya | 2012-02-28 |
| 8034723 | Film deposition apparatus and film deposition method | Yukio Ohizumi | 2011-10-11 |