Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8673079 | Film deposition apparatus and substrate processing apparatus | Hitoshi Kato, Manabu Honma | 2014-03-18 |
| D518884 | Heating tube for semiconductor-making furnace | — | 2006-04-11 |