Showing 1–6 of 6 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Tatsuo Nishita | Tokyo Electron Limited | 16 |
| 2 | Tomoki Haneishi | Tokyo Electron Limited | 2 |
| 2 | Kouji Oikawa | Fujitsu Limited | 2 |
| #4 | Takako Sano | Tokyo Electron Limited | 1 |
| #4 | Yoshiya Kikuchi | Sumitomo Electric Industries | 1 |
| #4 | Shuuichi Kikuchi | Tokyo Electron Limited | 1 |