Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12196492 | Heat treatment apparatus and heat treatment method | Tatsuya Yamaguchi | 2025-01-14 |
| 11784070 | Heat treatment apparatus, heat treatment method, and film forming method | Yasuaki Kikuchi, Tatsuya Yamaguchi, Ryuji Kusajima | 2023-10-10 |
| 11674224 | Film forming method and film forming apparatus | Yasuaki Kikuchi, Tatsuya Yamaguchi, Ryuji Kusajima | 2023-06-13 |
| 11656126 | Heat treatment apparatus and temperature control method | Koji Yoshii, Yuki Wada, Hitoshi Kikuchi | 2023-05-23 |
| 11581201 | Heat treatment apparatus and film deposition method | Tatsuya Yamaguchi, Yasuaki Kikuchi, Ryuji Kusajima, Shinya Nasukawa, Kazuyuki Kikuchi | 2023-02-14 |
| 10533896 | Heat treatment apparatus and temperature control method | Koji Yoshii, Yuki Wada, Hitoshi Kikuchi | 2020-01-14 |
| 10431479 | Heat treatment apparatus and temperature control method | Tatsuya Yamaguchi, Yasuaki Kikuchi, Koji Yoshii | 2019-10-01 |
| 8961691 | Film deposition apparatus, film deposition method, computer readable storage medium for storing a program causing the apparatus to perform the method | Hitoshi Kato, Manabu Honma | 2015-02-24 |