Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11674225 | Substrate processing apparatus | Hitoshi Kato, Manabu Honma, Takeshi Kobayashi | 2023-06-13 |
| 11572625 | Rotation detection jig, substrate processing apparatus and method of operating the substrate processing apparatus | Takeshi Kobayashi, Hitoshi Kato | 2023-02-07 |
| 10584416 | Substrate processing apparatus | Hitoshi Kato, Manabu Honma, Takeshi Kobayashi | 2020-03-10 |
| 10221480 | Substrate processing apparatus and substrate processing method | Hitoshi Kato, Manabu Honma | 2019-03-05 |
| 8845857 | Substrate processing apparatus | Manabu Honma | 2014-09-30 |
| 8034723 | Film deposition apparatus and film deposition method | Manabu Honma | 2011-10-11 |
| 7674336 | Processing apparatus | Manabu Honma, Keisuke Nagatsuka | 2010-03-09 |