Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9580802 | Film formation method and apparatus for semiconductor process | Hitoshi Kato | 2017-02-28 |
| 9416448 | Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method | Hitoshi Kato, Manabu Honma | 2016-08-16 |
| 8746170 | Substrate process apparatus, substrate process method, and computer readable storage medium | Manabu Honma, Tatsuya Tamura | 2014-06-10 |
| 8721790 | Film deposition apparatus | Hitoshi Kato, Manabu Honma, Yasushi Takeuchi, Hiroyuki Kikuchi | 2014-05-13 |
| 8298341 | Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus | Hitoshi Katoh, Tsuneyuki Okabe, Takashi Chiba | 2012-10-30 |