Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7479619 | Thermal processing unit | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Kazuhide Hasebe +3 more | 2009-01-20 |
| 7144823 | Thermal treatment apparatus | Takanori Saito, Toshiyuki Makiya, Hisaei Osanai, Tsuyoshi Takizawa, Kazuhide Hasebe +3 more | 2006-12-05 |
| 6283175 | Enveloping device and vertical heat-treating apparatus for semiconductor process system | — | 2001-09-04 |
| 6235121 | Vertical thermal treatment apparatus | Manabu Honma | 2001-05-22 |
| 6142773 | Enveloping device and vertical heat-treating apparatus for semiconductor process system | — | 2000-11-07 |
| 6062853 | Heat-treating boat for semiconductor wafers | Ken Nakao | 2000-05-16 |
| D423026 | Quartz cover | — | 2000-04-18 |
| 6030457 | Substrate processing apparatus | Kenji Honma, Makoto Nakamura | 2000-02-29 |
| 6031205 | Thermal treatment apparatus with thermal protection members intercepting thermal radiation at or above a predetermined angle | — | 2000-02-29 |
| D411176 | Wafer boat for use in a semiconductor wafer heat processing apparatus | — | 1999-06-22 |
| D409158 | Wafer boat for use in a semiconductor wafer heat processing apparatus | — | 1999-05-04 |
| D407696 | Inner tube for use in a semiconductor wafer heat processing apparatus | — | 1999-04-06 |
| D405431 | Tube for use in a semiconductor wafer heat processing apparatus | — | 1999-02-09 |
| D405062 | Processing tube for use in a semiconductor wafer heat processing apparatus | — | 1999-02-02 |
| D404371 | Wafer boat for use in a semiconductor wafer heat processing apparatus | — | 1999-01-19 |
| D404368 | Outer tube for use in a semiconductor wafer heat processing apparatus | — | 1999-01-19 |
| D404375 | Heat retaining tube base for use in a semiconductor wafer head processing apparatus | — | 1999-01-19 |
| 5775889 | Heat treatment process for preventing slips in semiconductor wafers | Junichi Kobayashi, Eiichiro Takanabe, Harunori Ushikawa | 1998-07-07 |
| 5718574 | Heat treatment apparatus | — | 1998-02-17 |
| 5709543 | Vertical heat treatment apparatus | — | 1998-01-20 |