Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8815737 | Method for forming NiSi film, method for forming silicide film, method for forming metal film for use in silicide-annealing, apparatus for vacuum processing and film-forming apparatus | Yasushi Higuchi, Toshimitsu Uehigashi, Kazuhiro Sonoda, Naoki Hanada | 2014-08-26 |
| 8809193 | Method for the formation of Co film and method for the formation of Cu interconnection film | Shoichiro Kumamoto, Satoru Toyoda | 2014-08-19 |
| 8796142 | Method for forming tantalum nitride film | Narishi Gonohe, Satoru Toyoda, Tomoyasu Kondo, Kyuzo Nakamura | 2014-08-05 |
| 8669191 | Method for forming Ni film | Toshimitsu Uehigashi, Yasushi Higuchi, Michio Ishikawa, Naoki Hanada | 2014-03-11 |
| 8476161 | Method for forming Cu electrical interconnection film | Shoichiro Kumamoto, Masamichi Harada | 2013-07-02 |
| 8377207 | Purge gas assembly | Tsuyoshi Kagami, Osamu Irino, Nobuyuki Kato | 2013-02-19 |
| 8158197 | Method for forming tantalum nitride film | Narishi Gonohe, Satoru Toyoda, Tomoyasu Kondo, Kyuzo Nakamura | 2012-04-17 |
| 8158198 | Method for forming tantalum nitride film | Narishi Gonohe, Satoru Toyoda, Tomoyasu Kondo, Kyuzo Nakamura | 2012-04-17 |
| 8105468 | Method for forming tantalum nitride film | Narishi Gonohe, Satoru Toyoda, Tomoyasu Kondo, Kyuzo Nakamura | 2012-01-31 |
| 6551896 | Capacitor for analog circuit, and manufacturing method thereof | Keizo Hosoda, Yusuke Muraki, Atsushi Sato | 2003-04-22 |
| 6140256 | Method and device for treating semiconductor with treating gas while substrate is heated | — | 2000-10-31 |
| 6007633 | Single-substrate-processing apparatus in semiconductor processing system | Masayuki Kitamura | 1999-12-28 |
| 5984607 | Transfer apparatus, transfer method, treatment apparatus and treatment method | Tetsu Oosawa | 1999-11-16 |
| 5904872 | Heating device, method of manufacturing the same, and processing apparatus using the same | Junichi Arami, Kenji Ishikawa, Isao Yanagisawa, Nobuo Kawada, Hiroshi Mogi | 1999-05-18 |
| 5775889 | Heat treatment process for preventing slips in semiconductor wafers | Junichi Kobayashi, Eiichiro Takanabe, Tomohisa Shimazu | 1998-07-07 |
| 5536320 | Processing apparatus | Kenji Tago | 1996-07-16 |
| 5378283 | Treating device | — | 1995-01-03 |
| 5310339 | Heat treatment apparatus having a wafer boat | — | 1994-05-10 |
| 5225378 | Method of forming a phosphorus doped silicon film | — | 1993-07-06 |
| 5116784 | Method of forming semiconductor film | — | 1992-05-26 |