Issued Patents All Time
Showing 25 most recent of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11728198 | Electrostatic chuck and wafer etching device including the same | Myoung Soo Park, Siqing Lu, Masashi Kikuchi | 2023-08-15 |
| 11309203 | Wafer stage and method of manufacturing the same | Kazuyuki Tomizawa, Masashi Kikuchi, Takafumi Noguchi, Kazuhiro Yamamuro | 2022-04-19 |
| 10718053 | Wafer loading apparatus and film forming apparatus | Kazuyuki Tomizawa, Masashi Kikuchi, Naoki Takahashi | 2020-07-21 |
| 9733431 | Noise reduction device and detection apparatus including same | — | 2017-08-15 |
| 9216609 | Radical etching apparatus and method | Hiroaki Inoue, Yasushi Higuchi | 2015-12-22 |
| 9059105 | Ashing apparatus | Masahisa Ueda, Takashi Kurimoto, Koukou Suu, Toshiya Yogo | 2015-06-16 |
| 8669191 | Method for forming Ni film | Toshimitsu Uehigashi, Yasushi Higuchi, Harunori Ushikawa, Naoki Hanada | 2014-03-11 |
| 8419854 | Film-forming apparatus | Masanobu Hatanaka, Osamu Irino | 2013-04-16 |
| 8367542 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Masanobu Hatanaka, Kanako Tsumagari | 2013-02-05 |
| 8252113 | Method for producing component for vacuum apparatus, resin coating forming apparatus and vacuum film forming system | Masanobu Hatanaka, Yoshikazu Takahashi, Fumio Nakamura | 2012-08-28 |
| 8183153 | Method for manufacturing semiconductor device | Hideaki Zama, Takumi Kadota, Chihiro Hasegawa | 2012-05-22 |
| 8125069 | Semiconductor device and etching apparatus | Toshio Hayashi, Yasuhiro Morikawa, Yuji Furumura, Naomi Mura | 2012-02-28 |
| 8084368 | Method of forming barrier film | Masanobu Hatanaka, Kanako Tsumagari | 2011-12-27 |
| 8043963 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Masanobu Hatanaka, Kanako Tsumagari | 2011-10-25 |
| 7828900 | Vacuum film-forming apparatus | Masanobu Hatanaka, Se-Ju Lim, Fumio Nakamura | 2010-11-09 |
| 7763115 | Vacuum film-forming apparatus | Masanobu Hatanaka, Se-Ju Lim, Fumio Nakamura | 2010-07-27 |
| 6897754 | Magnetic core for inductor | Bong Soo Jeong, Jin Wook Koo | 2005-05-24 |
| 6061020 | Method and apparatus for transmitting radio wave by rotating plane of polarization | Iwao Ishijima, Yasubumi Kanai, Akira Tsutsumi, Shigeki SUGIYAMA, Toshio Miyoshi | 2000-05-09 |
| 5840374 | Method of forming a SiO.sub.2 passivation film on a plastic substrate | Kazuyuki Ito, Kyuzo Nakamura, Jun Togawa, Noriaki Tani, Masanori Hashimoto +1 more | 1998-11-24 |
| 5606255 | Hall effect sensing apparatus for moving object having an adjustable magnetor yoke | Nobuyuki Shimbo, Junichi Ishiwata, Takatoshi Oyama, Fumio Ono | 1997-02-25 |
| 5554418 | Method of forming passivation film | Kazuyuki Ito, Kyuzo Nakamura, Jun Togawa, Noriaki Tani, Masanori Hashimoto +1 more | 1996-09-10 |
| 5288329 | Chemical vapor deposition apparatus of in-line type | Kyuzo Nakamura, Kazuyuki Ito, Noriaki Tani, Masanori Hashimoto, Yoshifumi Ota | 1994-02-22 |
| 5250339 | Magnetic recording medium | Noriaki Tani, Kyuzo Nakamura, Masanori Hashimoto, Yoshifumi Ota | 1993-10-05 |
| 5198309 | Magnetic recording member | Kyuzo Nakamura, Yoshifumi Ota, Taiki Yamada, Noriaki Tani | 1993-03-30 |
| 5147734 | Magnetic recording media manufactured by a process in which a negative bias voltage is applied to the substrate during sputtering | Kyuzo Nakamura, Yoshifumi Ota, Noriaki Tani, Masanori Hashimoto | 1992-09-15 |