Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8367542 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Masanobu Hatanaka, Michio Ishikawa | 2013-02-05 |
| 8084368 | Method of forming barrier film | Masanobu Hatanaka, Michio Ishikawa | 2011-12-27 |
| 8043963 | Semiconductor device manufacturing method and semiconductor device manufacturing apparatus | Masanobu Hatanaka, Michio Ishikawa | 2011-10-25 |