Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466475 | Ashing device | Masahisa Ueda, Takashi Kurimoto, Kyuzo Nakamura, Koukou Suu, Kazushige Komatsu +1 more | 2016-10-11 |
| 9059105 | Ashing apparatus | Masahisa Ueda, Takashi Kurimoto, Michio Ishikawa, Koukou Suu | 2015-06-16 |
| 6192318 | Apparatus and method for automatically matching microwave impedance | Atsushi Okuda, Masaaki Yano, Tomoyuki Mori | 2001-02-20 |
| 5939953 | E-H matching device and apparatus and method for automatically matching microwave impedance | Atsushi Okuda, Masaaki Yano, Tomoyuki Mori | 1999-08-17 |