| 12021229 |
Multifunctional engineered particle for a secondary battery and method of manufacturing the same |
Isaiah O. Oladeji, Akiyoshi Suzuki |
2024-06-25 |
|
| 11894547 |
Multifunctional engineered particle for a secondary battery and method of manufacturing the same |
Isaiah O. Oladeji, Akiyoshi Suzuki |
2024-02-06 |
|
| 10770656 |
Method for manufacturing phase change memory |
Gloria Wing Yun Fraczak, Matthew J. BrightSky, Chung H. Lam, Fabio Carta, Robert L. Bruce +1 more |
2020-09-08 |
$3,136,000 |
| 10553777 |
Multi-layered film, method of manufacturing the same, and manufacturing apparatus of the same |
Hiroki Kobayashi, Mitsunori Henmi, Mitsutaka HIROSE, Shinnosuke Mashima, Isao Kimura |
2020-02-04 |
|
| 9985196 |
Multi-layered film and method of manufacturing the same |
Hiroki Kobayashi, Mitsunori Henmi, Mitsutaka HIROSE, Kazuya TSUKAGOSHI, Isao Kimura |
2018-05-29 |
|
| 9466475 |
Ashing device |
Masahisa Ueda, Takashi Kurimoto, Kyuzo Nakamura, Toshiya Yogo, Kazushige Komatsu +1 more |
2016-10-11 |
|
| 9343207 |
Resistance change device, and method for producing same |
Natsuki Fukuda, Kazunori Fukuju, Yutaka Nishioka |
2016-05-17 |
|
| 9281477 |
Resistance change element and method for producing the same |
Yutaka Nishioka, Kazumasa Horita, Natsuki Fukuda, Shin Kikuchi |
2016-03-08 |
|
| 9269903 |
Method of manufacturing variable resistance element and apparatus for manufacturing the same |
Yutaka Nishioka, Kazumasa Horita, Natsuki Fukuda, Shin Kikuchi, Youhei Ogawa |
2016-02-23 |
|
| 9145605 |
Thin-film forming method and thin-film forming apparatus |
Takeshi Masuda, Takuya Ideno, Masahiko Kajinuma, Nobuhiro Odajima, Yohei Uchida |
2015-09-29 |
|
| 9059105 |
Ashing apparatus |
Masahisa Ueda, Takashi Kurimoto, Michio Ishikawa, Toshiya Yogo |
2015-06-16 |
|
| 8993449 |
Etching method |
Yasuhiro Morikawa |
2015-03-31 |
|
| 8591655 |
Apparatus for the preparation of film |
Takeshi Masuda, Masahiko Kajinuma, Takakazu Yamada, Hiroto Uchida, Masaki Uematsu |
2013-11-26 |
|
| 8262798 |
Shower head, device and method for manufacturing thin films |
Takakazu Yamada, Takeshi Masuda, Masahiko Kajinuma, Yutaka Nishioka, Masaki Uematsu |
2012-09-11 |
|
| 8168001 |
Film-forming apparatus and film-forming method |
Hiroto Uchida, Takehito Jinbo, Takeshi Masuda, Masahiko Kajinuma, Takakazu Yamada +2 more |
2012-05-01 |
|
| 8153926 |
Etching method and system |
Yasuhiro Morikawa, Toshio Hayashi |
2012-04-10 |
|
| 8133325 |
Dry cleaning method for plasma processing apparatus |
Masahisa Ueda, Yutaka Kokaze, Mitsuhiro Endou |
2012-03-13 |
|
| 8118935 |
Mixing box, and apparatus and method for producing films |
Takakazu Yamada, Takeshi Masuda, Masahiko Kajinuma, Masaki Uematsu |
2012-02-21 |
|
| 7728252 |
Etching method and system |
Yasuhiro Morikawa, Toshio Hayashi |
2010-06-01 |
|
| 7618493 |
Device and method for manufacturing thin films |
Takakazu Yamada, Takeshi Masuda, Masahiko Kajinuma, Yutaka Nishioka, Masaki Uematsu |
2009-11-17 |
|
| 6933010 |
Mixer, and device and method for manufacturing thin-film |
Takakazu Yamada, Takeshi Masuda, Masahiko Kajinuma, Masaki Uematsu |
2005-08-23 |
|
| 6682772 |
High temperature deposition of Pt/TiOx for bottom electrodes |
Glen Fox |
2004-01-27 |
$1,195,000 |
| 6521105 |
Sputtering apparatus |
Noriaki Tani, Kazuhiko Saito |
2003-02-18 |
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