Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305752 | Method for operating substrate processing apparatus | Masahisa Ueda, Yoshiaki Yoshida | 2016-04-05 |
| 8133325 | Dry cleaning method for plasma processing apparatus | Masahisa Ueda, Mitsuhiro Endou, Koukou Suu | 2012-03-13 |