Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8815737 | Method for forming NiSi film, method for forming silicide film, method for forming metal film for use in silicide-annealing, apparatus for vacuum processing and film-forming apparatus | Yasushi Higuchi, Kazuhiro Sonoda, Harunori Ushikawa, Naoki Hanada | 2014-08-26 |
| 8669191 | Method for forming Ni film | Yasushi Higuchi, Michio Ishikawa, Harunori Ushikawa, Naoki Hanada | 2014-03-11 |
| 6413392 | Sputtering device | Tsuyoshi Sahoda, Yasushi Higuchi, Kuniaki Nakajima, Tomoyasu Kondo | 2002-07-02 |