Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309203 | Wafer stage and method of manufacturing the same | Masashi Kikuchi, Michio Ishikawa, Takafumi Noguchi, Kazuhiro Yamamuro | 2022-04-19 |
| 10718053 | Wafer loading apparatus and film forming apparatus | Masashi Kikuchi, Michio Ishikawa, Naoki Takahashi | 2020-07-21 |