Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9194041 | Tris(dialkylamide)aluminum compound, and method for producing aluminum-containing thin film using same | Masashi Shirai, Hiroshi Nihei | 2015-11-24 |
| 8304567 | Organoruthenium complex, and method for production of ruthenium thin film using the ruthenium complex | Takumi Kadota, Hiroki Kanato, Hiroshi Nihei | 2012-11-06 |
| 8183153 | Method for manufacturing semiconductor device | Hideaki Zama, Michio Ishikawa, Takumi Kadota | 2012-05-22 |
| 7595414 | Metal complex compound comprising β-diketonato ligand | Takumi Kadota, Kouhei Watanuki, Hiroyuki Sakurai, Hiroki Kanato | 2009-09-29 |
| 6992200 | Copper complexes and process for formation of copper-containing thin films by using the same | Takumi Kadota, Kouhei Watanuki | 2006-01-31 |